Title:
INSPECTION DEVICE AND CONDUCTIVE PATTERN INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2006/112543
Kind Code:
A1
Abstract:
There are provided an inspection device and an inspection method capable of detecting open/short-circuit of a conductive pattern. A tip end of a probe (30) is brought into contact with only one end of one of the conductive patterns (15a, 15b) regularly arranged. A sensor unit (20) having a size covering the wiring pattern and the adjacent pattern is positioned in a non-contact way at a predetermined distance from the patterns. The probe (30) and the sensor unit (20) are shifted over a substrate to be inspected by synchronizing the probe (30) and the sensor unit (20). It is judged whether the pattern is short-circuited according to, for example, a difference between the detection signal level in the normal state and the detection signal level in an abnormal state or the tendency of the signal change between the detection signals.
Inventors:
HAMORI HIROSHI (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
Application Number:
PCT/JP2006/308683
Publication Date:
October 26, 2006
Filing Date:
April 19, 2006
Export Citation:
Assignee:
OHT INC (JP)
HAMORI HIROSHI (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
HAMORI HIROSHI (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
International Classes:
G01R31/02; G01R31/00; H05K3/00
Foreign References:
| JP2004191381A | 2004-07-08 | |||
| JPH08226949A | 1996-09-03 | |||
| JPH08105926A | 1996-04-23 | |||
| JPH06273468A | 1994-09-30 |
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