Title:
INSPECTION DEVICE AND METHOD FOR OPERATING INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/163608
Kind Code:
A1
Abstract:
An inspection device according to an embodiment of the present invention is able to carry out high-temperature inspection and low-temperature inspection for an objected to be inspected. This inspection device has: an inspection chamber in which the object to be inspected is inspected; a dry air supply part that is connected to the inspection chamber via a first valve and that supplies dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that measures the dew point in the inspection chamber; and a bypass pipe through which the dry air supply part and the dew point meter are connected to each other via a third valve.
Inventors:
OSUGA YASUHIRO (JP)
YAMAMOTO KOJU (TW)
YAMAMOTO KOJU (TW)
Application Number:
PCT/JP2019/005134
Publication Date:
August 29, 2019
Filing Date:
February 13, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/26
Foreign References:
| JP2005528781A | 2005-09-22 | |||
| JP2004273967A | 2004-09-30 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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