Title:
INSPECTION DEVICE, INSPECTION METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2018/110090
Kind Code:
A1
Abstract:
This inspection device has: an image acquisition unit for acquiring a light emission surface image that is an image obtained by capturing a light emission surface of a surface light source device; an inspection unit for setting an inspection range at a position where defects in the light emission surface image can appear, generating a one-dimensional brightness profile indicating a change of a brightness value along a first side in the inspection range, detecting extreme values of the brightness profile, calculating an evaluation value for evaluating the difference between adjacent extreme values, and determining the presence/absence of a defect on the basis of the evaluation value; and an output unit for outputting information acquired by the inspection unit.
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Inventors:
KONISHI YOSHINORI (JP)
Application Number:
PCT/JP2017/038328
Publication Date:
June 21, 2018
Filing Date:
October 24, 2017
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01M11/00
Foreign References:
| JP2005207808A | 2005-08-04 | |||
| JP2015042942A | 2015-03-05 | |||
| US20090015825A1 | 2009-01-15 |
Other References:
See also references of EP 3557216A4
Attorney, Agent or Firm:
SEKINE, Takehiko et al. (JP)
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