INSPECTION DEVICE, INSPECTION METHOD, AND PROGRAM

WIPO Patent Application WO/2019/069693

A1

The present disclosure pertains to an inspection device, an inspection method, and a program that make it possible to inspect the performance of an imaging element. Collimated light is generated, and part of the collimated light is transmitted through a transmission filter to which circular holes that are regularly arranged on a light-blocking surface are provided, whereby same is converted to regularly-arranged cylinders of collimated light, and an image composed of the regularly-arranged cylinders of collimated light is captured by an imaging element under inspection. Then, the difference between the image captured by the imaging element under inspection and an ideal image captured by an ideal imaging element is found, and the performance of the imaging element under inspection is examined by comparison between the difference and a threshold value. The present disclosure can be applied to the manufacture of imaging devices.

KIMURA KATSUJI (JP)
YAMANAKA HIROYUKI (JP)
FURUKAWA YUJI (JP)
HARADA KOHEI (JP)
TAKAHASHI HIRONORI (JP)
GOTO HIROYUKI (JP)
RYU HEIICHIRO (JP)
TATEBAYASHI KATSUAKI (JP)

PCT/JP2018/034730

April 11, 2019

September 20, 2018

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SONY SEMICONDUCTOR SOLUTIONS CORP (JP)

G01M11/00; G02B5/00; H01L21/66

WO2017014072A1

2017-01-26

JPH08292128A	1996-11-05
JP2008196916A	2008-08-28
JPH1187671A	1999-03-30
JPH07147309A	1995-06-06
JPH06244396A	1994-09-02
JP2012063220A	2012-03-29
JP2018110302A	2018-07-12

NISHIKAWA Takashi et al. (JP)

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