Title:
INSPECTION DEVICE, INSPECTION METHOD, AND RECORDING MEDIUM ON WHICH INSPECTION PROGRAM HAS BEEN RECORDED
Document Type and Number:
WIPO Patent Application WO/2017/145850
Kind Code:
A1
Abstract:
Provided are an inspection device and the like capable of correctly assessing the state of an object being inspected without destroying the object being inspected. An inspection device 101 includes: a feature quantity creating unit 103 which creates a vibration feature quantity representing a feature of vibration information representing vibrations measured by means of a plurality of vibration measuring devices capable of measuring vibrations generated by an object being inspected 201; a scattering degree calculating unit 104 which calculates a scattering degree representing the degree to which, during the period of the vibrations measured by means of the vibration measuring devices, the created vibration feature quantity is scattered; and an assessing unit 105 which assesses the state of the object being inspected 201 on the basis of the magnitude of the calculated scattering degree.
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Inventors:
KINOSHITA SHOHEI (JP)
KASAI SHIGERU (JP)
KASAI SHIGERU (JP)
Application Number:
PCT/JP2017/005223
Publication Date:
August 31, 2017
Filing Date:
February 14, 2017
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
G01N29/44; G01M7/08; G01N29/04; G01N29/11; G01N29/12; G01N29/48
Foreign References:
| JP2007024697A | 2007-02-01 | |||
| JPH03185318A | 1991-08-13 | |||
| JPS60260849A | 1985-12-24 | |||
| JPH06347450A | 1994-12-22 | |||
| JP2006250660A | 2006-09-21 |
Attorney, Agent or Firm:
SHIMOSAKA Naoki (JP)
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