INSPECTION DEVICE AND INSPECTION METHOD

WIPO Patent Application WO/2018/078752

A1

An inspection device according to the invention of the present application is provided with a fixing plate (24), a plurality of expanding and contracting parts (11) that each have one end fixed to the fixing plate (24), a plurality of contact probes (19) respectively fixed to the other ends of the expanding and contracting parts (11), and a plurality of fixing parts (12) respectively provided to the plurality of contact probes (19). Each of the fixing parts (12) switches between a fixing state in which the fixing part (12) fixes the upper end of the corresponding contact probe (19) from among the plurality of contact probes (19) in a first position and an open state in which the fixing part does not fix the contact probe. In the fixing state, the contact probe (19) is pulled toward the fixing plate (24) by the corresponding expanding and contracting part (11) from among the plurality of expanding and contracting parts (11), and in the open state, the upper end of the contact probe (19) is disposed at a second position closer to the fixing plate (24) than the first position.

KAGUCHI NAOTO (JP)
EBIIKE YUJI (JP)

PCT/JP2016/081776

May 03, 2018

October 26, 2016

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MITSUBISHI ELECTRIC CORP (JP)

G01R31/26; G01R1/073

JPH0289377U	1990-07-16
JPS62134579A	1987-06-17
JPS60190876A	1985-09-28
JPS5880891A	1983-05-16
JPS6194783U	1986-06-18
JPS61159174A	1986-07-18
JPS6414937A	1989-01-19
JP2012145454A	2012-08-02
JP2017003295A	2017-01-05

TAKADA, Mamoru et al. (JP)

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