Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/142554
Kind Code:
A1
Abstract:
This inspection device is provided with: a stage that supports an interposer; a capacitive probe unit capacitively coupled to a pad; an electric manipulator that controls the relative positions of the stage and the capacitive probe unit so that the capacitive probe unit is capacitively coupled to the pad; a network analyzer that outputs a RF signal to the pad via the capacitive probe unit, thereby measuring a reflection signal transmitted from the pad; and a control unit that determines, on the basis of reflection signal phase delay with respect to the RF signal, whether there is an abnormality of wiring.
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Inventors:
NAKAMURA TOMONORI (JP)
Application Number:
PCT/JP2018/045733
Publication Date:
July 25, 2019
Filing Date:
December 12, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01R1/06; G01R27/26; G01R27/28; G01R31/302; G01R31/50; H05K3/00
Foreign References:
| JP2009109445A | 2009-05-21 | |||
| JP2005241614A | 2005-09-08 | |||
| JP2010243507A | 2010-10-28 | |||
| JP2007309691A | 2007-11-29 | |||
| JP2016102772A | 2016-06-02 | |||
| JP2008026320A | 2008-02-07 | |||
| JP2008102031A | 2008-05-01 | |||
| JPS61218957A | 1986-09-29 | |||
| US6242923B1 | 2001-06-05 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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