Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/162618
Kind Code:
A1
Abstract:
This inspection device has: a transmission unit that irradiates a plurality of different positions of a first standard object with ultrasonic waves; a reception unit that receives a plurality of first ultrasonic waves emitted by the transmission unit and transmitted through the positions; a calculation unit that calculates a plurality of threshold values corresponding to the positions on the basis of reception intensities of the first ultrasonic waves; and a storage unit that stores the threshold values and values indicating the positions in such a manner as to be associated with each other.
Inventors:
NARA AKIHIRO (JP)
TERAOKA MAKOTO (JP)
KATAYAMA HIROKI (JP)
SASAMINE KEIICHIRO (JP)
TERAOKA MAKOTO (JP)
KATAYAMA HIROKI (JP)
SASAMINE KEIICHIRO (JP)
Application Number:
PCT/JP2020/004924
Publication Date:
August 13, 2020
Filing Date:
February 07, 2020
Export Citation:
Assignee:
YAMAHA FINE TECH CO LTD (JP)
International Classes:
G01N29/04; G01N29/48
Domestic Patent References:
| WO2015045781A1 | 2015-04-02 |
Foreign References:
| JPH0716224A | 1995-01-20 | |||
| JP2017138180A | 2017-08-10 | |||
| JP2002296249A | 2002-10-09 | |||
| JP2019015530A | 2019-01-31 | |||
| JP2011047655A | 2011-03-10 | |||
| JPH09264880A | 1997-10-07 | |||
| US20130269438A1 | 2013-10-17 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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