Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/195136
Kind Code:
A1
Abstract:
The present invention provides an inspection device for inspecting a sample in which a plurality of light-emitting elements are formed, wherein: the inspection device is provided with an excitation light source for generating excitation light beamed onto the sample, a camera for imaging fluorescence having a wavelength greater than a reference wavelength from among fluorescence from the light-emitting elements, and a control device for assessing the quality of the light-emitting elements on the basis of the fluorescence imaged by the camera. The reference wavelength is the wavelength obtained by adding the full width at half maximum of a normal fluorescence spectrum of the light-emitting elements to the peak wavelength of the normal fluorescence spectrum.
Inventors:
NAKAMURA TOMONORI (JP)
Application Number:
PCT/JP2020/003248
Publication Date:
October 01, 2020
Filing Date:
January 29, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L21/66; G01N21/64; G01N21/88
Foreign References:
| JP2010118668A | 2010-05-27 | |||
| JP2015010834A | 2015-01-19 | |||
| JPS63250835A | 1988-10-18 | |||
| JP2015010834A | 2015-01-19 |
Other References:
See also references of EP 3951845A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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