Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/107470
Kind Code:
A1
Abstract:
The present invention pertains to an inspection device for inspecting a housing container that includes a light-transmitting transparent section and configured to house a wafer. The inspection device is characterized by comprising: a flat luminaire that is provided so as to emit light on a to-be-inspected portion including at least a portion of the transparent section of the housing container; and a camera that is provided so as to oppose the flat luminaire with the to-be-inspected portion of the housing container interposed therebetween, that captures an image of the to-be-inspected portion, and that detects any foreign matter and/or defect of the to-be-inspected portion of the housing container. As a result, it is possible to provide an inspection device and inspection method capable of more reliably inspecting whether or not any foreign matter or defect is present in a housing device for a wafer as compared to visual inspection by a human.
More Like This:
Inventors:
KARAKI YOICHI (JP)
ICHIKAWA SHINNOSUKE (JP)
ICHIKAWA SHINNOSUKE (JP)
Application Number:
PCT/JP2021/036895
Publication Date:
May 27, 2022
Filing Date:
October 06, 2021
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
International Classes:
H01L21/673; G01N21/88
Foreign References:
| JPH0547911A | 1993-02-26 | |||
| JP2005091243A | 2005-04-07 | |||
| JP2001215199A | 2001-08-10 | |||
| JPH11340310A | 1999-12-10 | |||
| JP2019517668A | 2019-06-24 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
Download PDF:
Previous Patent: METHOD FOR PRODUCING COLORED LAYER, AGENT, AND LAYERED BODY
Next Patent: METAL MOLDED BODY
Next Patent: METAL MOLDED BODY