Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/145101
Kind Code:
A1
Abstract:
This inspection device for inspecting a surface to be inspected that is disposed on an inspection surface comprises: an X-ray emission tube for radiating X-rays toward the inspection surface, the X-ray emission tube having a target including an X-ray generating part that generates X-rays in response to irradiation with an electron beam; and an X-ray detector for detecting X-rays that are radiated from foreign matter present on the surface to be inspected irradiated with X-rays from the X-ray generating part, and that are totally reflected by the surface to be inspected.
Inventors:
TSUKAMOTO TAKEO (JP)
Application Number:
PCT/JP2022/016709
Publication Date:
August 03, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
G01N23/223; G01N23/04; G01N23/2206
Domestic Patent References:
| WO2017104659A1 | 2017-06-22 |
Foreign References:
| JP2009236622A | 2009-10-15 | |||
| JP2013044644A | 2013-03-04 | |||
| US6829327B1 | 2004-12-07 | |||
| JP2005292077A | 2005-10-20 | |||
| JP2009236622A | 2009-10-15 | |||
| JP2022013653A | 2022-01-18 |
Attorney, Agent or Firm:
OHTSUKA PATENT OFFICE, P.C. (JP)
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