Title:
INSPECTION DEVICE, INSPECTION SYSTEM, INSPECTION METHOD, AND INSPECTION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/286247
Kind Code:
A1
Abstract:
An inspection device (11) comprises: a data collection unit (41) that collects, as measurement data, measurement values for each vibration frequency for each of N (where N is an integer greater than or equal to 3) objects under inspection from a vibration detection unit (31) that outputs vibration measurement values by detecting vibration in the objects, which are vibrated by a vibration unit (21); a data analysis unit (51) that, for each combination of two objects under inspection from among the N objects under inspection, carries out processing for calculating the similarity of the measurement data for the two objects under inspection from among the N objects under inspection, and calculates evaluation values that are similarity statistics for each of the N objects under inspection; and a diagnosis unit (61) that compares the evaluation values for the N objects under inspection with each other and uses the result of the comparison to produce a diagnosis for each of the N objects under inspection as to whether the same is abnormal.
Inventors:
SADAMOTO KOTA (JP)
ARAKI HIROSHI (JP)
ARAKI HIROSHI (JP)
Application Number:
PCT/JP2021/026640
Publication Date:
January 19, 2023
Filing Date:
July 15, 2021
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01H1/00; G01M7/02; G01M13/00
Domestic Patent References:
| WO2015071925A1 | 2015-05-21 |
Foreign References:
| JP2021032822A | 2021-03-01 | |||
| JP2008232763A | 2008-10-02 | |||
| JP2015064376A | 2015-04-09 |
Attorney, Agent or Firm:
YAMAGATA Yoichi et al. (JP)
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