Title:
INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/190952
Kind Code:
A1
Abstract:
Provided is an inspection device capable of uniformly supplying an antioxidant gas to the tips of a large number of probe needles disposed across a wide area. An inspection device for performing an electrical inspection of an inspection subject through bringing into contact with each other an electrode pad formed on the surface of the inspection subject in a wafer state and the tip of a probe needle (12) attached to a cantilever-type probe card (11) having an opening part (11a), the inspection device being provided with a gas supply means (16) for supplying the antioxidant gas for preventing the oxidation of the tip of the probe needle (12) to the tip of the probe needle (12) from above the probe card (11) and through the opening (11a), the gas supply means (16) having a plurality of ejection ports (16e) for ejecting the antioxidant gas, the ejection ports (16e) being disposed in a surface facing the opening (11a) in a uniformly dispersed manner.
Inventors:
YOSHIOKA KOHJI
Application Number:
PCT/JP2013/064626
Publication Date:
December 27, 2013
Filing Date:
May 27, 2013
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L21/66; G01R1/073; G01R31/26
Foreign References:
| JPH11218548A | 1999-08-10 | |||
| JP2004111442A | 2004-04-08 |
Attorney, Agent or Firm:
MASAKI, YOSHIFUMI (JP)
Yoshifumi Masaki (JP)
Yoshifumi Masaki (JP)
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