Title:
INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/116911
Kind Code:
A1
Abstract:
This inspection device inspects an imaging device formed in an object to be inspected by bringing a contact terminal into electrical contact with a wiring layer of the imaging device while causing light to enter the imaging device, wherein the light enters the imaging device from a back surface that is a surface on the side reverse to the side on which the wiring layer is provided, and the inspection device is provided with: a mounting table which is formed from a light transmissive material and on which the object to be inspected is mounted in such a manner that the mounting table faces the back surface of the imaging device; and a light irradiation mechanism which is disposed to face the object to be inspected with the mounting table interposed therebetween, and which has a plurality of LEDs oriented toward the object to be inspected.
Inventors:
KASAI SHIGERU (JP)
AKAIKE YUTAKA (JP)
NAKAYAMA HIROYUKI (JP)
FUJISAWA YOSHINORI (JP)
AKAIKE YUTAKA (JP)
NAKAYAMA HIROYUKI (JP)
FUJISAWA YOSHINORI (JP)
Application Number:
PCT/JP2018/044009
Publication Date:
June 20, 2019
Filing Date:
November 29, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/26
Domestic Patent References:
| WO2014020713A1 | 2014-02-06 |
Foreign References:
| JP2009170730A | 2009-07-30 | |||
| JPH09288143A | 1997-11-04 | |||
| JP2007071822A | 2007-03-22 | |||
| JP2013004810A | 2013-01-07 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Download PDF: