Title:
INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/029143
Kind Code:
A1
Abstract:
A slit 6 receives light emitted from a light source 1 and has a plurality of openings. A first lens 7 is disposed such that a front focal position is positioned in the slit 6, focuses light that has passed through the slit 6, and guides a slit image towards an inspection object W side. A light receiving lens receives light that has passed through or reflected by the inspection object. A light receiving element array 10 is configured by a plurality of light receiving elements arranged in an array, and receives light that has passed through the light receiving lens. The light receiving element array 10 receives at least a slit image in a pixel constituted by one or more light receiving elements.
Inventors:
IWASAKI OSAMU (JP)
WATANABE RYUTA (JP)
RYUMAN KAZUAKI (JP)
WATANABE RYUTA (JP)
RYUMAN KAZUAKI (JP)
Application Number:
PCT/JP2023/015897
Publication Date:
February 08, 2024
Filing Date:
April 21, 2023
Export Citation:
Assignee:
VIENEX CORP (JP)
International Classes:
G01N21/892
Foreign References:
| JP2016033461A | 2016-03-10 | |||
| JP2003214824A | 2003-07-30 | |||
| JP2000275027A | 2000-10-06 |
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu (JP)
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