Title:
INSPECTION JIG AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/212814
Kind Code:
A1
Abstract:
This inspection jig (3) comprises: an electrode (34a); a probe (Pr) having a front end section (P1) and a rear end section (P2), which are adapted to make contact with a bump (BP) of an object (101) to be inspected; and a support member (31) for supporting the probe (Pr). The probe (Pr) includes an electrically conductive outer hollow cylindrical body (Pa) and an electrically conductive inner hollow cylindrical body (Pb) which is inserted in the outer hollow cylindrical body (Pa). Outer spring sections (SO1, SO2) which axially extend and contract and which press the rear end section (P2) are formed on the outer hollow cylindrical body (Pa), inner spring sections (SI1, SI2) which axially extend and contract are formed on the inner hollow cylindrical body (Pb), one end of the inner hollow cylindrical body (Pb) is defined as the front end section (P1), the front end section (P1) protrudes from one end of the outer hollow cylindrical section (Pa), and the support member (31) holds the outer hollow cylindrical body (Pa) so that the rear end section (P2) is brought in contact with the electrode (34a) by the pressing force of the outer spring sections (SO1, SO2).
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Inventors:
KANAI TOSHIHIKO (JP)
OTA NORIHIRO (JP)
YOKOTA YUSUKE (JP)
OTA NORIHIRO (JP)
YOKOTA YUSUKE (JP)
Application Number:
PCT/JP2017/016550
Publication Date:
December 14, 2017
Filing Date:
April 26, 2017
Export Citation:
Assignee:
NIDEC-READ CORP (JP)
International Classes:
G01R1/067; G01R1/06; G01R31/26; G01R31/28
Domestic Patent References:
| WO2011132613A1 | 2011-10-27 |
Foreign References:
| JP2010204082A | 2010-09-16 | |||
| JP2014127407A | 2014-07-07 | |||
| JPS63253271A | 1988-10-20 | |||
| JP2002520864A | 2002-07-09 | |||
| JP2006208329A | 2006-08-10 | |||
| US6617866B1 | 2003-09-09 | |||
| JP2006510028A | 2006-03-23 | |||
| US20170122978A1 | 2017-05-04 | |||
| JP2017120265A | 2017-07-06 |
Attorney, Agent or Firm:
YANAGINO Takao et al. (JP)
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