INSPECTION METHOD AND DEVICE FOR SAME - HITACHI HIGH-TECHNOLOGIES CORPORATION

Title:

INSPECTION METHOD AND DEVICE FOR SAME

Document Type and Number:

WIPO Patent Application WO/2011/111440

Kind Code:

A1

Abstract:

In order to rapidly inspect shape defects in the object of inspection that is the minute pattern on a magnetic recording medium formed from patterned media, in the disclosed patterned media defect inspection method detected spectral waveform data is compared with reference-standard spectral reflectance waveform data, which is stored in a database and the pattern-shape of which is known, and defects are detected. The type of the defects is determined on the basis of the disparity, for each detected wavelength, between the spectral waveform data of the detected defects, and the reference-standard spectral reflectance waveform data.

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Inventors:

YANAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
谷中　優 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
芹川　滋 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)

Application Number:

JP2011/052050

Publication Date:

September 15, 2011

Filing Date:

February 01, 2011

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Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YANAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
谷中　優 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)

International Classes:

G01N21/95; G11B5/84; G11B7/26

Attorney, Agent or Firm:

POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)

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