Title:
INSPECTION METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/014935
Kind Code:
A1
Abstract:
When the electrical characteristics of an inspection target are measured, higher magnification and higher resolution of an SEM image and real time performance are realized without affecting the electrical characteristics of the inspection target. A first image is acquired which has high image quality and high magnification and includes an image at a target position in an inspection target on a sample. Next, a second image is acquired which has low image quality and low magnification and includes a probe image and the image at the target position in the inspection target on the sample. Next, by combining first image data in the second image, an image for coarse observation at the same magnification as the magnification of the second image is generated. The generation of an image for coarse inspection is repeated until the probe comes close to the target position in the inspection target.
Inventors:
NARA Yasuhiko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
奈良 安彦 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
奈良 安彦 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/067095
Publication Date:
February 02, 2012
Filing Date:
July 27, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NARA Yasuhiko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NARA Yasuhiko (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
G01B15/00; G01R1/06; G01R31/28; H01L21/66
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims:
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