INSPECTION POSITION SPECIFICATION METHOD, THREE-DIMENSIONAL IMAGE GENERATION METHOD, AND INSPECTION DEVICE

Title:

INSPECTION POSITION SPECIFICATION METHOD, THREE-DIMENSIONAL IMAGE GENERATION METHOD, AND INSPECTION DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/065701

Kind Code:

A1

Abstract:

Provided are: an inspection position specification method with which accurate inspection is possible without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected; a three-dimensional image generation method with which a three-dimensional image necessary for inspection can be generated without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected, and with which inspection can be performed using the image; and an inspection device including these methods. An inspection device 100 comprises: a storage unit 34 that stores a radiation transmission image of an object to be inspected (substrate) and a three-dimensional image generated from the radiation transmission image; and a control unit 10. A process executed by the control unit 10 for specifying an inspection position in the three-dimensional image includes: a step for specifying, in the radiation transmission image, the position of a transmission image of an inspection position; and a step for specifying an inspection position in the three-dimensional image from the position of the transmission image.

Inventors:

HIRAYAMA TAKUMA (JP)
YAMAMOTO YOSUKE (JP)

Application Number:

PCT/JP2018/035606

Publication Date:

April 04, 2019

Filing Date:

September 26, 2018

Export Citation:

Click for automatic bibliography generation Help

Assignee:

SAKI CORP (JP)

International Classes:

G01N23/046; G01N23/18

Foreign References:

JP2011247588A	2011-12-08
JP2005233760A	2005-09-02
JP2011149737A	2011-08-04
JP2003514233A	2003-04-15
JP2008026334A	2008-02-07

Other References: