INSPECTION SYSTEM AND INSPECTION METHOD

WIPO Patent Application WO/2019/083009

A1

An inspection system (1) having a hollow inspection head (10) which extends in a rod shape along a center axis (11), a rotation unit (20) which rotates the inspection head around the center axis (11), an optical system (30) which supplies a laser beam for inspection along the center axis (11) through the interior of the inspection head (10), and receives reflected light from the surface (4) of an inspection target (2) which is returned along the center axis, and an optical element (50) which is positioned at or near the tip of the inspection head, emits the laser beam for inspection toward the inspection target, and guides the reflected light in the center axis direction, wherein the optical element has a reflection surface capable of tilting in a manner such that the normal line thereof relative to the center axis forms an angle θ, and the angle θ satisfies the condition of 46°≤θ≤55°.

JPH04153073	PICTURE FORMATION DEVICE
JP6336742	How to detect installations from concrete surface images
WO/2015/102657	FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS USING SUBSTRATE SUPPORT SHAPED TO MATCH SPATIAL PROFILE OF DEPOSITION PLUME

SATO SHINGO (JP)
HASEGAWA DAICHI (JP)
YAMAURA KENYA (JP)

PCT/JP2018/039845

May 02, 2019

October 26, 2018

Click for automatic bibliography generation  

NAGANO AUTOMATION CO LTD (JP)

G01N21/84; G01N21/954; G02B23/24; G02B23/26

JP2005164398A	2005-06-23
JPS5965708A	1984-04-14
JP2005128527A	2005-05-19
JPH11281331A	1999-10-15
JP2001519026A	2001-10-16
US20110080588A1	2011-04-07

IMAI, Akira (JP)

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