INSPECTION SYSTEM AND INSPECTION METHOD

WIPO Patent Application WO/2019/083010

A1

A system 100 has: a movement table (40) which includes a clamp (41) for holding the outer-peripheral sides of a workpiece (2) which includes a through-hole (3); an inspection head (10) which inserts into and withdraws from the through-hole an inspection probe (12) for scanning the inner-circumferential surface of the through-hole by outputting an inspection light from the tip thereof through a first opening (3a) on one side of the through-hole (3) in the workpiece at a first position (P1) to which the workpiece is transported by the movement table; a preliminary test unit (5) for inserting a dummy probe (51) into the interior of the through-hole and withdrawing the same therefrom through a second opening (3b) on the other side of the through-hole in the workpiece at the first position; and a unit (47) for verifying whether there is contact between the workpiece and the dummy probe.

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SATO SHINGO (JP)
HASEGAWA DAICHI (JP)
ENDO MASAHIRO (JP)
YAMAURA TAKASHI (JP)
YAMAURA KENYA (JP)

PCT/JP2018/039846

May 02, 2019

October 26, 2018

Click for automatic bibliography generation  

NAGANO AUTOMATION CO LTD (JP)

G01N21/84; G01N21/954; G02B23/24; G02B23/26

JPH0618246A	1994-01-25
JPH09251129A	1997-09-22
JP2003329606A	2003-11-19
JP2012187599A	2012-10-04
JP2016057140A	2016-04-21
JP2014190884A	2014-10-06
JP2014191242A	2014-10-06
JP3159316U	2010-05-20
JP2013088136A	2013-05-13
US5895927A	1999-04-20

IMAI, Akira (JP)

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