INSPECTION SYSTEM AND INSPECTION METHOD

WIPO Patent Application WO/2019/111426

A1

[Problem] To provide an illumination device for inspection that makes it possible to discern the amount of light variation caused by a feature point of an object of inspection across a full field of view even if the light variation is small and makes it possible to detect the feature point under homogeneous conditions. [Solution] The illumination device 100 for inspection is provided with a surface light source 1. A lens 2 is disposed between the surface light source 1 and the object W of inspection on the side of a light blocking mask M1 or filter means F1, whichever is closer to the object W of inspection, such that at least one from among the light blocking mask M1 and filter means F1 is positioned so as to be centered on the focal position of the lens. The irradiation solid angle when the light emitted from the surface light source 1 is irradiated onto the object W of inspection by the lens 2 is made to have a solid angle region that has specific optical attributes and is disposed radially from the center of the optical axis. It is possible to set the shape, size, and angle of inclination of the irradiation solid angle of the inspection light and the solid angle region that is within the irradiation solid angle and has specific optical attributes in accordance with changes in the feature point of the object of inspection such that the same are substantially uniform across the whole field of view.

MASUMURA SHIGEKI (JP)

PCT/JP2018/010667

June 13, 2019

March 17, 2018

Click for automatic bibliography generation  

MACHINE VISION LIGHTING INC (JP)

G01N21/84; G01B11/24; G01N21/88

WO2017051447A1

2017-03-30

JP2011232087A	2011-11-17
JP2010112941A	2010-05-20
JPH07306023A	1995-11-21
JP5866586B1	2016-02-17

See also references of EP 3620777A4

View/Download PDF      PDF Help

Previous Patent: CELL PACK

Next Patent: SLICE ENCAPSULATING DEVICE AND MANUFACTURING METHOD AND USE THEREOF