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Patent Searching and Data


Title:
INSPECTION SYSTEM AND TEMPERATURE MEASURING METHOD FOR INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/211775
Kind Code:
A1
Abstract:
An inspection system (10) comprises: an inspection device (30) that includes a stage (21) on which a substrate (W) is mounted and that inspects the substrate (W) on the stage (21); a temperature adjustment mechanism (63) that adjusts the temperature of the stage (21); a substrate housing part (17a); a temperature measurement substrate standby part (17c) that causes a temperature measurement substrate (TW) to be on standby; a conveyance device (18) that conveys the substrate (W) and the temperature measurement substrate (TW) onto the stage (21); and a camera (16) used for aligning the substrate (W) on the stage (21). The temperature measurement substrate (TW) includes, on the surface thereof, a temperature measurement member (52) the state of which changes depending on the temperature. The conveyance device (18) conveys the temperature measurement substrate (TW) onto the stage, the camera (16) images the temperature measurement member (52), and the temperature of the temperature measurement substrate (TW) is measured from the change in the state of the temperature measurement member.

Inventors:
MOCHIZUKI Jun (2381-1 Kitagejo Fujii-cho, Nirasaki-sh, Yamanashi 11, 〒4078511, JP)
YAMASAKI Yoshihito (2381-1 Kitagejo Fujii-cho, Nirasaki-sh, Yamanashi 11, 〒4078511, JP)
Application Number:
JP2018/007834
Publication Date:
November 22, 2018
Filing Date:
March 01, 2018
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
H01L21/66; G01K11/12
Foreign References:
JPH11354596A1999-12-24
JP2000162048A2000-06-16
JP2013254812A2013-12-19
Attorney, Agent or Firm:
TAKAYAMA Hiroshi (Parco Prezioso 202, 1-21-1 Nakagawachuo Tsuzuki-ku, Yokohama-sh, Kanagawa 03, 〒2240003, JP)
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