Title:
INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2010/016137
Kind Code:
A1
Abstract:
An inspection system (100) and the like that can calculate data for the inspection with high S/N ratio and high accuracy or any other data with enhanced degree of flexibility. For such a purpose, the inspection system (100) adjusts imaging timing to synchronize a time period inwhich a projected image of an object W on an imaging device (22) moves by m pixels (m is an integer of 1 or more) in the X direction with an imaging time interval, and identifies each partial image data obtained by imaging the same inspection positions on the object W from each two-dimensional image data obtained by imaging at each imaging timing in accordance with a fact that the object W appears in a state of shifting by m pixels in the X direction in each two-dimensional image data. On the basis of each partial image data, the inspection data is generated for which noise reduction processing is applied at the inspection positions.
Inventors:
MIYAKE ATSUSHI (JP)
Application Number:
PCT/JP2008/064252
Publication Date:
February 11, 2010
Filing Date:
August 07, 2008
Export Citation:
Assignee:
KDE CORP (JP)
MIYAKE ATSUSHI (JP)
MIYAKE ATSUSHI (JP)
International Classes:
G01N21/958
Foreign References:
| JP2000352557A | 2000-12-19 | |||
| JP2008501960A | 2008-01-24 | |||
| JP2004251878A | 2004-09-09 | |||
| JPH0989603A | 1997-04-04 | |||
| JPH08247954A | 1996-09-27 | |||
| JP2004251878A | 2004-09-09 |
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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