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Title:
INSPECTION TERMINAL UNIT, PROBE CARD AND METHOD FOR MANUFACTURING INSPECTION TERMINAL UNIT
Document Type and Number:
WIPO Patent Application WO/2016/031512
Kind Code:
A1
Abstract:
In the present invention, an inspection terminal unit is provided with: at least two inspection pins (20) having, at one end, a contact part that comes into contact with an element to be inspected and having, at the other end, a connection part (25) connected to a substrate (3); and a holding part (30) that integrally holds at least two of the inspection pins (20) which are disposed in parallel.

Inventors:
TERANISHI HIROTADA (JP)
SAKAI TAKAHIRO (JP)
OZAKI HIDEAKI (JP)
Application Number:
PCT/JP2015/072170
Publication Date:
March 03, 2016
Filing Date:
August 05, 2015
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01R1/073; G01R31/26; H01L21/66
Foreign References:
JP2001194384A2001-07-19
JP2007183250A2007-07-19
JPH07316872A1995-12-05
Other References:
See also references of EP 3187883A4
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
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