Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INSULATION BOARD AND VACUUM EVAPORATION DEVICE ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2019/140854
Kind Code:
A1
Abstract:
An insulation board for vacuum evaporation and a vacuum evaporation device assembly. The insulation board comprises: an insulation board body; a first protrusion provided on the insulation board body and extending in the first direction; and a second protrusion provided on the insulation board body and extending in the second direction; wherein the position of the first protrusion and the position of the second protrusion are mutually staggered, and the first direction and the second direction are opposite. In addition, provided is a vacuum evaporation device assembly, comprising a process chamber; and the insulation board; wherein the insulation board is provided on the inner wall of the process chamber. The heat insulation effect of the insulation board is improved and the service life of the vacuum evaporation device is prolonged, and the maintenance cost of the device is reduced.

Inventors:
BAO, Weicheng (Room 3001, No. 6 Building No. 7 Rong Chang East Street,Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
Application Number:
CN2018/090154
Publication Date:
July 25, 2019
Filing Date:
June 06, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD. (Room 3001, No. 6 Building No. 7 Rong Chang East Street,Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
International Classes:
H01L21/02; C23C14/24; F16L59/02; F16L59/08; H01L31/042
Foreign References:
CN102869462A2013-01-09
CN106245796A2016-12-21
CN205954894U2017-02-15
CN103156490A2013-06-19
US20130221482A12013-08-29
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (F6 Xijin Centre, 39 Lianhuachi East Rd. Haidian District, Beijing 6, 100036, CN)
Download PDF: