Title:
INSULATION COATING METHOD FOR METAL BASE, INSULATION COATED METAL BASE, AND SEMICONDUCTOR MANUFACTURING APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/135786
Kind Code:
A1
Abstract:
Disclosed is an insulation coating method for a metal base, which comprises a thermal spraying step (S1), an impregnation step (S2), and a beam irradiation step (S3). In the thermal spraying step (S1), a first insulation coating film is formed by thermally spraying a first meal oxide to the surface of a metal base. In the impregnation step (S2), pores formed in the surface of the first insulation coating film are impregnated with a sol that contains, as a dispersoid, a metal oxide, a hydrate of a metal oxide, or a metal hydroxide. In the beam irradiation step (S3), a second insulation coating film that is composed of a second metal oxide is formed by irradiating the first insulation coating film and the sol with a high energy beam after the impregnation step (S2).
Inventors:
SANO TAKAMICHI (JP)
MIYAJI SHINYA (JP)
SAITO SHINJI (JP)
MIYAJI SHINYA (JP)
SAITO SHINJI (JP)
Application Number:
PCT/JP2011/002140
Publication Date:
November 03, 2011
Filing Date:
April 12, 2011
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
SANO TAKAMICHI (JP)
MIYAJI SHINYA (JP)
SAITO SHINJI (JP)
SANO TAKAMICHI (JP)
MIYAJI SHINYA (JP)
SAITO SHINJI (JP)
International Classes:
C23C4/18; C23C4/10; C23C4/12; C23C28/04
Foreign References:
JPH10306363A | 1998-11-17 | |||
JPH0570922A | 1993-03-23 | |||
JP2004190136A | 2004-07-08 | |||
JP2003136853A | 2003-05-14 | |||
JP2005350309A | 2005-12-22 | |||
JPS61104062A | 1986-05-22 |
Attorney, Agent or Firm:
KIKUCHI, OSAMU (JP)
Kikuchi 治 (JP)
Kikuchi 治 (JP)
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Claims: