INTEGRATED CIRCUIT WITH ZERO TEMPERATURE COEFFICIENT CAPACITOR

Title:

INTEGRATED CIRCUIT WITH ZERO TEMPERATURE COEFFICIENT CAPACITOR

Document Type and Number:

WIPO Patent Application WO/2012/061126

Kind Code:

A3

Abstract:

An integrated circuit (1000) has a zero temperature coefficient (ZTC) capacitor formed together with a metal oxide semiconductor (MOS) transistor. The capacitor has a capacitor lower plate (1010) formed in a same layer with a MOS electrode (1012), a capacitor dielectric layer (1022) implanted to have a phosphorus density of 1.7χ 1020 to 2.3χ 1020 atoms/cm3, and a capacitor upper plate (1026).

Inventors:

TIAN WEIDONG (US)
KAHN IMRAN (US)

Application Number:

PCT/US2011/057672

Publication Date:

August 02, 2012

Filing Date:

October 25, 2011

Export Citation:

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Assignee:

TEXAS INSTRUMENTS INC (US)
TEXAS INSTRUMENTS JAPAN (JP)
TIAN WEIDONG (US)
KAHN IMRAN (US)

International Classes:

H01L27/04

Foreign References:

EP0736905A2	1996-10-09
KR20040048752A	2004-06-10
US6870418B1	2005-03-22
EP0183623A2	1986-06-04

Attorney, Agent or Firm:

FRANZ, Warren, L. et al. (Deputy General Patent CounselP.O. Box 655474, Mail Station 399, Dallas TX, US)

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