Title:
INTEGRATED PHASE SEPARATOR FOR ULTRA HIGH VACUUM SYSTEM
Document Type and Number:
WIPO Patent Application WO2002024983
Kind Code:
A9
Abstract:
An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The cryogenic panel includes a cryogenic shroud region and a phase separator region. Liquid nitrogen is introduced into the cryogenic panel via an inlet line. As the liquid nitrogen warms and vaporizes, nitrogen vapor rises within the shroud. The phase separator region within the cryogenic panel provides a near atmospheric pressure vapor barrier over the liquid nitrogen so that the nitrogen vapor may escape smoothly through the outlet of the panel, without forming gas bursts. Also, the phase separator region is vacuum jacketed to prevent cryogenic shroud surface temperature changes due to variations in liquid nitrogen levels, thereby increasing the cryogenic shroud's pumping stability.
Inventors:
COLOMBO PAUL E
Application Number:
PCT/US2001/029685
Publication Date:
March 27, 2003
Filing Date:
September 21, 2001
Export Citation:
Assignee:
APPLIED EPI INC (US)
International Classes:
B01J3/02; C23C14/28; C30B23/02; B01J3/00; F04B37/08; H01L21/203; (IPC1-7): C30B23/02; F25J1/02; F04B37/08
Download PDF: