Title:
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUCER (PMUT) ON INTEGRATED CIRCUIT (IC) FOR FINGERPRINT SENSING
Document Type and Number:
WIPO Patent Application WO/2016/040333
Kind Code:
A3
Abstract:
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
Inventors:
TSAI JULIUS MING-LIN (US)
DANEMAN MICHAEL (US)
DANEMAN MICHAEL (US)
Application Number:
PCT/US2015/048964
Publication Date:
May 06, 2016
Filing Date:
September 08, 2015
Export Citation:
Assignee:
INVENSENSE INC (US)
International Classes:
B81B7/04; G06K9/00; B81C1/00; H03H3/007
Domestic Patent References:
| WO2015009635A1 | 2015-01-22 |
Foreign References:
| EP1533743A1 | 2005-05-25 | |||
| US20140145244A1 | 2014-05-29 |
Attorney, Agent or Firm:
JOSHI, Vinay et al. (Turocy & Watson LLP,127 Public Square,57th Fl, Cleveland Ohio, US)
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