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Patent Searching and Data


Title:
INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT AND INTEGRATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/134595
Kind Code:
A1
Abstract:
The present invention provides an integrated structure of a crystal resonator and a control circuit and an integration method therefor. A lower cavity is formed in a device wafer and an upper cavity is formed in a substrate, the device wafer and the substrate are bonded by a bonding process to clamp a piezoelectric resonator between the device wafer and the substrate, the lower cavity and the upper cavity respectively correspond to the two sides of the piezoelectric resonator to form the crystal resonator, and the crystal resonator is electrically connected to the control circuit, thereby realizing the integrated arrangement of the crystal resonator and the control circuit. Compared with a conventional crystal resonator, the crystal resonator in the present invention has smaller size, thereby facilitating reducing power consumption of the crystal resonator; moreover, the crystal resonator in the present invention is also easier to be integrated with other semiconductor devices, thereby improving the integration level of the device.

Inventors:
QIN XIAOSHAN (CN)
Application Number:
PCT/CN2019/115643
Publication Date:
July 02, 2020
Filing Date:
November 05, 2019
Export Citation:
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Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/02; H03H9/17
Foreign References:
CN108667437A2018-10-16
US9444426B22016-09-13
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
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