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Patent Searching and Data


Title:
INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT, AND METHOD FOR INTEGRATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/134597
Kind Code:
A1
Abstract:
Provided are an integrated structure of crystal resonator and control circuit, and method for integration thereof. A lower cavity (120) is formed in a device wafer (100) on which a control circuit (110) is formed, and a piezoelectric resonator plate (200) is formed on the device wafer (100); a semiconductor planar process is used to form a capping layer (420) so as to cap the piezoelectric resonator plate (200) in an upper cavity (400) to form a crystal resonator; in addition, a semiconductor chip (500) is further bonded to the same device wafer, facilitating the achievement of parameters for modulation of a crystal resonator on a chip and improving device performance. The crystal resonator has a smaller size, helping to reduce the power consumption of the crystal resonator, and also is easier to integrate with other semiconductor components, thus improving the degree of integration of the device.

Inventors:
QIN XIAOSHAN (CN)
Application Number:
PCT/CN2019/115646
Publication Date:
July 02, 2020
Filing Date:
November 05, 2019
Export Citation:
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Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/02
Foreign References:
JPH05259739A1993-10-08
CN202906852U2013-04-24
CN201266912Y2009-07-01
CN1237830A1999-12-08
CN101132169A2008-02-27
CN102916671A2013-02-06
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
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