Title:
INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT AND INTEGRATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/134599
Kind Code:
A1
Abstract:
An integrated structure of a crystal resonator and a control circuit and an integration method therefor. A lower cavity (120) is formed in a device wafer (100) provided with the control circuit and an upper cavity (310) is formed in a substrate (300), and the device wafer (100) and the substrate (300) are bonded by a bonding process to clamp a piezoelectric resonator between the device wafer (100) and the substrate (300), thereby realizing the integrated arrangement of the crystal resonator and the control circuit. A semiconductor chip (700) may also be further bonded to the back surface of the same device wafer (100).
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Inventors:
QIN XIAOSHAN (CN)
Application Number:
PCT/CN2019/115649
Publication Date:
July 02, 2020
Filing Date:
November 05, 2019
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/02
Foreign References:
| JP2012050057A | 2012-03-08 | |||
| US7608986B2 | 2009-10-27 | |||
| JP2008219206A | 2008-09-18 | |||
| US20150280688A1 | 2015-10-01 | |||
| CN108259017A | 2018-07-06 |
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
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