Title:
INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT AND INTEGRATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/134605
Kind Code:
A1
Abstract:
An integrated structure of a crystal resonator and a control circuit and an integration method therefor. Lower cavities (120) are formed in a device wafer (100) on which a control circuit (110) is formed, piezoelectric resonator sheets (200) are formed on the device wafer (100), and a capping layer (420) is formed by further utilizing a semiconductor planar process so as to cap the piezoelectric resonator sheets (200) in upper cavities (400) to constitute a crystal resonator. The present crystal resonator has a smaller size, which is helpful for reducing the power consumption thereof, and the crystal resonator is more easily integrated with other semiconductor components, thereby improving the integration of the device.
Inventors:
QIN XIAOSHAN (CN)
Application Number:
PCT/CN2019/115658
Publication Date:
July 02, 2020
Filing Date:
November 05, 2019
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/17; H03H9/02
Foreign References:
| US20060202779A1 | 2006-09-14 | |||
| US20060202779A1 | 2006-09-14 | |||
| CN108667437A | 2018-10-16 | |||
| CN107181472A | 2017-09-19 | |||
| CN106877836A | 2017-06-20 | |||
| US7323953B2 | 2008-01-29 |
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
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