Title:
INTEGRATED STRUCTURE OF AND INTEGRATED METHOD FOR CRYSTAL RESONATOR AND CONTROL CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2020/134594
Kind Code:
A1
Abstract:
An integrated structure of and an integrated method for a crystal resonator and a control circuit. A lower cavity (120) is formed in a device wafer (100) provided with a control circuit (110), and an upper cavity (310) is formed in a substrate (300); the device wafer (100) and the substrate (300) is bonded by means of a bonding process to sandwich a piezoelectric resonator sheet between the device wafer (100) and the substrate (300), so that a crystal resonator and the control circuit (110) is integrated. In addition, a semiconductor chip (700) can further be bonded to the back surface of the same device wafer (100) to facilitate further improving the integration of the crystal resonator and to achieve the on-chip modulation of parameters of the crystal resonator. Compared with traditional crystal resonators, the present crystal resonator has a smaller size, the power consumed by the crystal resonator is reduced, and the crystal resonator is also easier to integrate with other semiconductor devices, thereby improving the integration of devices.
More Like This:
| JP2000307382 | LADDER FILTER |
| WO/2022/089597 | FILTER COMPRISING DOPED RESONATOR, AND MULTIPLEXER AND COMMUNICATION DEVICE |
Inventors:
QIN XIAOSHAN (CN)
Application Number:
PCT/CN2019/115642
Publication Date:
July 02, 2020
Filing Date:
November 05, 2019
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/205; H03H3/02
Foreign References:
| CN107181470A | 2017-09-19 | |||
| CN107222181A | 2017-09-29 | |||
| CN108173525A | 2018-06-15 | |||
| US20170264265A1 | 2017-09-14 | |||
| US20170264263A1 | 2017-09-14 |
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
Download PDF: