Title:
INTERFERENCE MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2011/096200
Kind Code:
A1
Abstract:
In order to improve the measurement accuracy in an interference measurement device using the interference of light, provided is an interference measurement device configured by a light source (10) which emits supercontinuum light (SC light), an optical fiber coupler (11) which divides the SC light into measurement light and reference light, a dispersion compensation element (12), a drive unit (13) which moves the dispersion compensation element (12), and a light receiving means (14) which measures the interference waveform between the measurement light and the reference light. A measurement object (15) that is an object to be measured is a Si substrate with a thickness of 800 μm. The dispersion compensation element (12) is a Si substrate with a thickness of 780μm. That is to say, the dispersion compensation element (12) is produced from the same material as the measurement object (15) and thinner than the measurement object (15) by 20μm. The peak width of interference caused by reflections from the back surface of the measurement object (15) and the back surface of the dispersion compensation element (12) is narrow since the wavelength dispersion is substantially canceled, thereby improving the measurement accuracy of the peak position. As a result, the measurement accuracy of the temperature and the like is improved.
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Inventors:
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
ITO, Masafumi (1-501 Shiogamaguchi, Tempaku-ku, Nagoya-sh, Aichi 02, 〒4688502, JP)
伊藤 昌文 (〒02 愛知県名古屋市天白区塩釜口１－５０１学校法人名城大学内 Aichi, 〒4688502, JP)
堀 勝 (〒01 愛知県名古屋市千種区不老町１番国立大学法人名古屋大学内 Aichi, 〒4648601, JP)
ITO, Masafumi (1-501 Shiogamaguchi, Tempaku-ku, Nagoya-sh, Aichi 02, 〒4688502, JP)
伊藤 昌文 (〒02 愛知県名古屋市天白区塩釜口１－５０１学校法人名城大学内 Aichi, 〒4688502, JP)
Application Number:
JP2011/000561
Publication Date:
August 11, 2011
Filing Date:
February 02, 2011
Export Citation:
Assignee:
National University Corporation Nagoya University (1 Furo-cho, Chikusa-ku Nagoya-sh, Aichi 01, 〒4648601, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
NU System Corporation (Suite #1, Science Exchange Plaza 2271-129, Aza Anagahora, Oaza Shimoshidami, Moriyama-ku, Nagoya-sh, Aichi 03, 〒4630003, JP)
ＮＵシステム株式会社 (〒03 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２７１番地１２９ サイエンス交流プラザ１号室 Aichi, 〒4630003, JP)
Meijo University (1-501, Shiogamaguchi Tempaku-ku, Nagoya-sh, Aichi 02, 〒4688502, JP)
学校法人名城大学 (〒02 愛知県名古屋市天白区塩釜口１－５０１ Aichi, 〒4688502, JP)
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
国立大学法人名古屋大学 (〒01 愛知県名古屋市千種区不老町１番 Aichi, 〒4648601, JP)
NU System Corporation (Suite #1, Science Exchange Plaza 2271-129, Aza Anagahora, Oaza Shimoshidami, Moriyama-ku, Nagoya-sh, Aichi 03, 〒4630003, JP)
ＮＵシステム株式会社 (〒03 愛知県名古屋市守山区大字下志段味字穴ヶ洞２２７１番地１２９ サイエンス交流プラザ１号室 Aichi, 〒4630003, JP)
Meijo University (1-501, Shiogamaguchi Tempaku-ku, Nagoya-sh, Aichi 02, 〒4688502, JP)
学校法人名城大学 (〒02 愛知県名古屋市天白区塩釜口１－５０１ Aichi, 〒4688502, JP)
HORI, Masaru (1 Furo-cho, Chikusa-ku, Nagoya-sh, Aichi 01, 〒4648601, JP)
International Classes:
G01B11/06; G01B9/02; G01K11/12
Attorney, Agent or Firm:
FUJITANI, Osamu (Marunouchi KS Bldg. 16F, 18-25 Marunouchi 2-chome, Naka-ku, Nagoya-sh, Aichi 02, 〒4600002, JP)
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