Title:
INTERFEROMETER, AND FOURIER TRANSFORM SPECTROMETRY DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/148726
Kind Code:
A1
Abstract:
Reference light (semiconductor laser beam) from a reference light source (21) is converted into parallel light by means of a collimating optical system (22), is divided by means of a BS (13), and is reflected by means of a moving mirror (16) and a fixed mirror (15). Subsequently, the reference light is combined by means of the BS (13) and is guided to a second light detector (25) as reference interference light. A correction unit (30) detects and corrects, on the basis of the received light signal of the reference interference light from the second light detector (25), the angle between the light which entered to a first light detector (18) via the moving mirror (16) and the light which entered the first light detector (18) via the fixed mirror (15). In the abovementioned configuration, the size of the light emission surface of the reference light source (21) is smaller than the size of the light emission surface of the measurement light which enters the BS (13).
Inventors:
HIRAO YUSUKE (JP)
Application Number:
PCT/JP2011/058984
Publication Date:
December 01, 2011
Filing Date:
April 11, 2011
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
HIRAO YUSUKE (JP)
HIRAO YUSUKE (JP)
International Classes:
G01J3/45
Domestic Patent References:
| WO2008128547A1 | 2008-10-30 |
Foreign References:
| JP2002148116A | 2002-05-22 | |||
| JPH063192A | 1994-01-11 | |||
| JPS63168522A | 1988-07-12 | |||
| JPS63168502A | 1988-07-12 | |||
| JP2008281484A | 2008-11-20 | |||
| JP2005521893A | 2005-07-21 |
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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Claims:
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