Title:
INTERFEROMETER AND FOURIER TRANSFORMATION SPECTROPHOTOMETER
Document Type and Number:
WIPO Patent Application WO/2012/002101
Kind Code:
A1
Abstract:
In a first optical system (10), light from a measurement optical input section (11) is divided at a BS (13) and guided to a moving mirror (15) and a fixed mirror (14). The light obtained by reflection at the moving mirror (15) and the fixed mirror (14) is combined at the BS (13) to form first interference light which is guided to a first optical detector (17). The moving mirror (15) is moved in the direction of the optical axis of the incoming light by means of a drive mechanism (18). An inclination correction section (100) implements drive for the fixed mirror (14) for example, in order to correct the relative inclination of the light reflected by the moving mirror (15) and the light reflected by the fixed mirror (14), said relative inclination being produced by the inclination of the moving mirror (15) during drive implemented by the drive mechanism (18). The drive for the moving mirror (15) implemented by the drive mechanism (18) is resonant drive, and the drive for the fixed mirror (14) implemented by the inclination correction section (100) is non-resonant drive.
Inventors:
HARA YOSHIHIRO (JP)
YAHASHI AKIRA (JP)
KAWANO TOSHIO (JP)
YAHASHI AKIRA (JP)
KAWANO TOSHIO (JP)
Application Number:
PCT/JP2011/062761
Publication Date:
January 05, 2012
Filing Date:
June 03, 2011
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
HARA YOSHIHIRO (JP)
YAHASHI AKIRA (JP)
KAWANO TOSHIO (JP)
HARA YOSHIHIRO (JP)
YAHASHI AKIRA (JP)
KAWANO TOSHIO (JP)
International Classes:
G01J3/45
Domestic Patent References:
| WO2011058874A1 | 2011-05-19 |
Foreign References:
| JPH07111379B2 | 1995-11-29 | |||
| JP2005169553A | 2005-06-30 |
Other References:
B.M. HOELING ET AL.: "Phase modulation at 125 kHz in a Michelson interferometer using an inexpensive piezoelectric stack driven at resonance", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 72, no. 3, March 2001 (2001-03-01), pages 1630 - 1633, XP012039017, DOI: doi:10.1063/1.1347375
Y.WATANABE ET AL.: "Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-axis Vibration and X, Y Bi-directional Tilting, and an application to Low Coherent Optical Interferometer", PROCEEDINGS OF THE 24TH SENSOR SYMPOSIUM ON SENSORS, MICROMACHINES, AND APPLIED SYSTEMS, 16 October 2007 (2007-10-16), pages 363 - 366, XP008170080
Y.WATANABE ET AL.: "Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-axis Vibration and X, Y Bi-directional Tilting, and an application to Low Coherent Optical Interferometer", PROCEEDINGS OF THE 24TH SENSOR SYMPOSIUM ON SENSORS, MICROMACHINES, AND APPLIED SYSTEMS, 16 October 2007 (2007-10-16), pages 363 - 366, XP008170080
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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Claims:
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