Title:
INTERNAL TEMPERATURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/088024
Kind Code:
A1
Abstract:
An internal temperature sensor capable of measuring the internal temperature of a measurement subject with good precision and responsiveness. An internal temperature sensor (20) is provided with: substrates (21, 22) in contact on one side thereof with a surface to be measured of the measurement subject during measurement of the internal temperature of the measurement subject; a heat flux sensor (30) having a first temperature measurement part and a second temperature measurement part provided on the other side of the substrates and manufactured by a MEMS process, the heat flux sensor (30) including a thin-film part in which a thermopile (32) is formed for detecting a temperature difference between the first temperature measurement part and the second temperature measurement part, and the thin-film part being supported so that a space between the first temperature measurement part and the substrates is present due to a thermally conductive member for conducting heat from the measurement subject which flows in via the substrates to the second temperature measurement part, and the thin-film part is parallel to the substrates; and a temperature sensor (41) for measuring the temperature of the portion of the substrate in contact with the thermally conductive member.
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Inventors:
NAKAGAWA SHINYA (JP)
SHIMIZU MASAO (JP)
HAMAGUCHI TSUYOSHI (JP)
SHIMIZU MASAO (JP)
HAMAGUCHI TSUYOSHI (JP)
Application Number:
PCT/JP2014/083042
Publication Date:
June 18, 2015
Filing Date:
December 12, 2014
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01K7/00; B81B1/00
Foreign References:
| JP2002372464A | 2002-12-26 | |||
| JPS6010138A | 1985-01-19 | |||
| JPS61239127A | 1986-10-24 | |||
| JP2013210327A | 2013-10-10 |
Attorney, Agent or Firm:
SERA Kazunobu et al. (JP)
Kazunobu Sera (JP)
Kazunobu Sera (JP)
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