Title:
INTERPENETRATING POLYMER NETWORK STRUCTURE AND POLISHING PAD AND PROCESSES FOR PRODUCING THEM
Document Type and Number:
WIPO Patent Application WO/2008/012909
Kind Code:
A1
Abstract:
This invention provides a process for producing an interpenetrating polymer network structure, comprising the steps of impregnating a radical polymerizable composition containing an ethylenically unsaturated compound and a radical polymerizable initiator into a polymer molded product and polymerizing the ethylenically unsaturated compound under such a state that the polymer molded product impregnated with the radical polymerizable composition has been swollen. In this process, before the step of impregnating the radical polymerizable composition into the polymer molded product, a chain transfer agent and/or a radical polymerization inhibitor are added to the radical polymerizable composition and/or the polymer molded product. This process can provide a highly uniform interpenetrating polymer network structure. There are also provided a polishing pad, which is high in in-plane uniformity of the polishing speed during the polishing, has excellent flattening properties, and has an improved pad life in the polishing, and a process for producing the same.
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Inventors:
TABATA, Norikazu (19-41, Akibadai Otsu-sh, Shiga 22, 5200822, JP)
田畑 憲一 (〒22 滋賀県大津市秋葉台１９－４１ Shiga, 5200822, JP)
HASHISAKA, Kazuhiko (16-26, Nogohara 1-chome Otsu-sh, Shiga 33, 5202133, JP)
橋阪 和彦 (〒33 滋賀県大津市野郷原１丁目１６－２６ Shiga, 5202133, JP)
SUGIMURA, Masahiro (10-B2-35, Sonoyama 2-chome Otsu-sh, Shiga 42, 5200842, JP)
杉村 正宏 (〒42 滋賀県大津市園山２丁目１０－Ｂ２－３５ Shiga, 5200842, JP)
SAKAMOTO, Takuo (2660-54, Kibogaoka-Honmachi 4-chome Konan-cho, Koka-sh, Shiga 32, 5203332, JP)
田畑 憲一 (〒22 滋賀県大津市秋葉台１９－４１ Shiga, 5200822, JP)
HASHISAKA, Kazuhiko (16-26, Nogohara 1-chome Otsu-sh, Shiga 33, 5202133, JP)
橋阪 和彦 (〒33 滋賀県大津市野郷原１丁目１６－２６ Shiga, 5202133, JP)
SUGIMURA, Masahiro (10-B2-35, Sonoyama 2-chome Otsu-sh, Shiga 42, 5200842, JP)
杉村 正宏 (〒42 滋賀県大津市園山２丁目１０－Ｂ２－３５ Shiga, 5200842, JP)
SAKAMOTO, Takuo (2660-54, Kibogaoka-Honmachi 4-chome Konan-cho, Koka-sh, Shiga 32, 5203332, JP)
Application Number:
JP2006/314950
Publication Date:
January 31, 2008
Filing Date:
July 28, 2006
Export Citation:
Assignee:
TORAY INDUSTRIES, INC. (1-1 Nihonbashi-Muromachi 2-chome, Chuo-ku Tokyo, 66, 1038666, JP)
東レ株式会社 (〒66 東京都中央区日本橋室町２丁目１番１号 Tokyo, 1038666, JP)
TABATA, Norikazu (19-41, Akibadai Otsu-sh, Shiga 22, 5200822, JP)
田畑 憲一 (〒22 滋賀県大津市秋葉台１９－４１ Shiga, 5200822, JP)
HASHISAKA, Kazuhiko (16-26, Nogohara 1-chome Otsu-sh, Shiga 33, 5202133, JP)
橋阪 和彦 (〒33 滋賀県大津市野郷原１丁目１６－２６ Shiga, 5202133, JP)
SUGIMURA, Masahiro (10-B2-35, Sonoyama 2-chome Otsu-sh, Shiga 42, 5200842, JP)
杉村 正宏 (〒42 滋賀県大津市園山２丁目１０－Ｂ２－３５ Shiga, 5200842, JP)
東レ株式会社 (〒66 東京都中央区日本橋室町２丁目１番１号 Tokyo, 1038666, JP)
TABATA, Norikazu (19-41, Akibadai Otsu-sh, Shiga 22, 5200822, JP)
田畑 憲一 (〒22 滋賀県大津市秋葉台１９－４１ Shiga, 5200822, JP)
HASHISAKA, Kazuhiko (16-26, Nogohara 1-chome Otsu-sh, Shiga 33, 5202133, JP)
橋阪 和彦 (〒33 滋賀県大津市野郷原１丁目１６－２６ Shiga, 5202133, JP)
SUGIMURA, Masahiro (10-B2-35, Sonoyama 2-chome Otsu-sh, Shiga 42, 5200842, JP)
杉村 正宏 (〒42 滋賀県大津市園山２丁目１０－Ｂ２－３５ Shiga, 5200842, JP)
International Classes:
C08J5/14; B24B37/00; C08J9/36; H01L21/304
Attorney, Agent or Firm:
IWAMI, Tomonori (TORAY INDUSTRIES INC., 1-1, Sonoyama 1-chome, Otsu-sh, Shiga 58, 5208558, JP)
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