Title:
ION ANALYZER
Document Type and Number:
WIPO Patent Application WO/2020/230297
Kind Code:
A1
Abstract:
This ion analyzer 1 is provided with: an ionization chamber 10; an analysis chamber 20 separated from the ionization chamber 10 by a partition wall 21 in which an opening 211 is formed; an ionization part 3 which generates ions from a sample 11 in the ionization chamber 10; ion transport parts 22, 23, 24 which are provided in the analysis chamber 20 and transport the ions generated from the ionization part; an ion capturing part 25 which captures the ions transported by the ion transport parts 22, 23, 24; an ion detection part 26 which is provided in the analysis chamber 20 and detects ions discharged from the ion capturing part 25; and a single exhaust mechanism 28 which is connected only to the analysis chamber 20 and makes the analysis chamber 20 have a pressure of 10-3 Pa or less.
Inventors:
YAMAUCHI SHOSEI (JP)
FURUTA MASAJI (JP)
HOSOI KOSUKE (JP)
FURUTA MASAJI (JP)
HOSOI KOSUKE (JP)
Application Number:
PCT/JP2019/019345
Publication Date:
November 19, 2020
Filing Date:
May 15, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01J49/24; H01J49/42
Domestic Patent References:
| WO2015133259A1 | 2015-09-11 | |||
| WO2009031179A1 | 2009-03-12 |
Foreign References:
| JP2001273869A | 2001-10-05 | |||
| JP2016115565A | 2016-06-23 | |||
| JPS5192679A | 1976-08-13 | |||
| JP2004206933A | 2004-07-22 | |||
| JPH08178899A | 1996-07-12 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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