Title:
ION BEAM EXTRACTION ELECTRODE AND ION SOURCE
Document Type and Number:
WIPO Patent Application WO/2016/170703
Kind Code:
A1
Abstract:
To improve maintainability of an ion beam extraction electrode.
An ion beam extraction electrode (E) is equipped with: an electrode unit (1) that is provided with openings which ion beams pass through; and a supporting frame (11) that fixes and supports the electrode unit (1). A cooling medium flow channel (12) is formed in the supporting frame (11), and the supporting frame is provided with a shift regulation unit (13) that limits, at the time when the electrode unit (1) is disposed on the supporting frame (11), a shift of the electrode unit (1) within a plane substantially perpendicular to the direction in which the ion beams pass through.
Inventors:
KAI HIROAKI (JP)
INOUCHI YUTAKA (JP)
NISHIMURA IPPEI (JP)
INOUCHI YUTAKA (JP)
NISHIMURA IPPEI (JP)
Application Number:
PCT/JP2015/078594
Publication Date:
October 27, 2016
Filing Date:
October 08, 2015
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD (JP)
International Classes:
H01J27/02; H01J37/08
Foreign References:
| JP2012195177A | 2012-10-11 | |||
| JPH08250055A | 1996-09-27 | |||
| JPH1116507A | 1999-01-22 | |||
| JP2012195077A | 2012-10-11 | |||
| JPH0732851U | 1995-06-16 |
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