Title:
ION-BEAM GENERATING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/007546
Kind Code:
A1
Abstract:
Provided is an ion-beam generating device that can achieve high-precision uniformity in substrate processing, and reduction in power consumption, without having a substrate-rotating mechanism installed. The ion-beam generating device (1a, 1b) is provided with: a discharging basin for generating plasma; a pull-out electrode that has an inclined section arranged in inclination with respect to the face to be irradiated, and that pulls out ions generated at the aforementioned discharging basin; a rotation-driving section (30) that is installed on the outside of the aforementioned discharging basin, and rotates the aforementioned pull-out electrode section; and a rotation supporting member (31) for coupling the aforementioned rotate-driving section (30) and the aforementioned pull-out electrode (7). An insulator block (34) that is installed around the aforementioned rotation supporting member (31) is provided inside the aforementioned discharging basin.
Inventors:
HIRAYANAGI, Hirohisa (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
平柳裕久 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
MIYOSHI, Ayumu (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
平柳裕久 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
MIYOSHI, Ayumu (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2010/004522
Publication Date:
January 20, 2011
Filing Date:
July 13, 2010
Export Citation:
Assignee:
CANON ANELVA CORPORATION (5-1 Kurigi 2-chome, Asao-ku Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
HIRAYANAGI, Hirohisa (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
平柳裕久 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
HIRAYANAGI, Hirohisa (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
平柳裕久 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
International Classes:
H01J27/02; H01J37/08; H01L21/302
Attorney, Agent or Firm:
WATANABE, Keisuke et al. (6th Floor, Mitsui Sumitomo Ginko Okachimachi Bldg. 11-4, Taito 4-chome, Taito-k, Tokyo 16, 〒1100016, JP)
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