Title:
ION BEAM GENERATOR
Document Type and Number:
WIPO Patent Application WO/2013/080543
Kind Code:
A1
Abstract:
An ion beam generator (1) according to an embodiment of the present invention comprises: a plasma generating unit which generates plasma in a discharge tank (3); an extraction electrode (7) which is provided so as to face a predetermined wall of the discharge tank (3) to draw ion beams from the plasma; a rotatable member (4) disposed in the discharge tank (3); and a driving means (11) which rotates the member (4) about an axis of rotation (8) which is perpendicular to a surface of the extraction electrode (7). A surface of the member (4) toward the extraction electrode (7) is an inclined surface (4a), a portion of an outer periphery of the inclined surface is the closest area (4b) to the extraction electrode (7), and another portion of the outer periphery of the inclined surface is the farthest area (4c) from the extraction electrode (7). The closest area (4b) and the farthest area (4c) are disposed so as to face a part where the axis of rotation (8) and the inclined surface (4a) intersect each other. The inclined surface is formed in a manner such that the distance between the inclined surface and the extraction electrode tends to increase from the closest area toward the farthest area.
Inventors:
AKASAKA HIROSHI (JP)
KAMIYA YASUSHI (JP)
TSUJIYAMA MASASHI (JP)
KAMIYA YASUSHI (JP)
TSUJIYAMA MASASHI (JP)
Application Number:
PCT/JP2012/007646
Publication Date:
June 06, 2013
Filing Date:
November 28, 2012
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
H01J27/16; H01J37/08
Domestic Patent References:
| WO2007029777A1 | 2007-03-15 | |||
| WO2011007546A1 | 2011-01-20 |
Foreign References:
| JP2011119657A | 2011-06-16 | |||
| US20040163766A1 | 2004-08-26 | |||
| JP2001326216A | 2001-11-22 |
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
Okabe 讓 (JP)
Okabe 讓 (JP)
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Claims: