Title:
ION BEAM SOURCE
Document Type and Number:
WIPO Patent Application WO/2005/048286
Kind Code:
A1
Abstract:
The invention relates to a device for producing ion beams for processing product surfaces and for coating said surfaces and, more specifically to ion beam sources provided with a closed electron drift which makes it possible to produce a ribbon ion beam. The aim of said invention is to simplify the serial production of ion beam sources having different sizes, improve performance characteristics and extend the field of application thereof. The inventive ion beam source comprises a hollow body, an anode which is used for connection to the positive pole of a constant-voltage source and is arranged in the body cavity, a cathode which is used for connection to the negative pole of said constant-voltage source and provided with an ion emitting slot remote from the anode, a magnetomotive force source and at least one channel for supplying a working gas to said body cavity. According to said invention, said hollow body is formed, at least partially, by a groove which is embodied in such a way that it is closed in the axial direction thereof and along which the slot and anode are arranged. Said groove can consists of several sections whose ends are jointed and connected to each other, two or more groove-forming sections being curved-shaped. The inventive embodiment makes it possible to design a range of sources based on relatively small set of standard elements having different sizes, different shapes and a different ion beam orientation and to process products having irregular shapes and curved surfaces.
Inventors:
PARFENENOK MIKHAIL ANTONOVICH (RU)
TELEGIN ALEKSANDR PROKOFEVICH (RU)
TELEGIN ALEKSANDR PROKOFEVICH (RU)
Application Number:
PCT/RU2003/000522
Publication Date:
May 26, 2005
Filing Date:
November 25, 2003
Export Citation:
Assignee:
PARFENENOK MIKHAIL ANTONOVICH (RU)
TELEGIN ALEKSANDR PROKOFEVICH (RU)
TELEGIN ALEKSANDR PROKOFEVICH (RU)
International Classes:
H01J27/02; H01J37/08; (IPC1-7): H01J27/02
Foreign References:
| RU2030807C1 | 1995-03-10 | |||
| SU854197A1 | 1986-01-07 | |||
| US5763989A | 1998-06-09 | |||
| US4277304A | 1981-07-07 |
Attorney, Agent or Firm:
Parfenenok, Mikhail Antonovich (28-118 Moscow, 1, RU)
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