Title:
ION DETECTION DEVICE AND ION DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/125670
Kind Code:
A1
Abstract:
Provided is an ion detection device comprising a mechanism for converting ions into electrons and amplifying the electrons obtained by the conversion, which enables a reduction in noise caused by stray light.
The ion detection device is provided with an ion-electron conversion electrode which converts mass-fractionated ions into electrons, and an amplification mechanism which is configured so as to amplify the electrons, the amplification mechanism leading the electrons obtained by the conversion by the ion-electron conversion electrode thereinto by an electric field and amplifying the electrons. The ion-electron conversion electrode has any one of a needle shape, a ribbon shape, a mesh shape, or a slit shape.
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Inventors:
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SHIOKAWA Yoshiro (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SHIOKAWA Yoshiro (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2009/058464
Publication Date:
November 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木2-5-1 Kanagawa, 〒2158550, JP)
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木2-5-1 Kanagawa, 〒2158550, JP)
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
International Classes:
H01J49/06; H01J43/10; H01J43/18; H01J43/22; H01J49/42
Attorney, Agent or Firm:
OKABE Masao et al. (No. 602, Fuji Bldg. 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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