Title:
ION FILTER AND METHOD FOR MANUFACTURING ION FILTER
Document Type and Number:
WIPO Patent Application WO/2017/094896
Kind Code:
A1
Abstract:
Provided is an ion filter (1) used for a gas detector (100). The invention has an insulation substrate (11), a first electroconductive layer pattern (12) formed on one main surface of the insulation substrate (11), a second electroconductive layer pattern (13) formed on the other main surface of the insulation substrate (11), and a plurality of through-holes (30) formed along the thickness direction of the insulation substrate (11). The one main surface of the insulation substrate (11) is positioned upstream of the gas detector (100) in the direction of electron movement, the other main surface of the insulation substrate (11) is positioned downstream of the gas detector (100) in the direction of electron movement, and the line width (W12) of the first electroconductive layer pattern (12) is greater than the line width (W13) of the second electroconductive layer pattern (13).
Inventors:
ARAI DAISUKE (JP)
Application Number:
PCT/JP2016/085947
Publication Date:
June 08, 2017
Filing Date:
December 02, 2016
Export Citation:
Assignee:
FUJIKURA LTD (JP)
International Classes:
H01J47/06
Foreign References:
| JP2001508935A | 2001-07-03 | |||
| US20020149305A1 | 2002-10-17 | |||
| JP2011517050A | 2011-05-26 | |||
| JP2016062736A | 2016-04-25 | |||
| JP2007234485A | 2007-09-13 |
Other References:
EVERAERTS, PIETER: "RATE CAPABILITY AND ION FEEDBACK IN GEM-DETECTOR S", FACULTEIT INGENIERSWETENSCHAPPEN, UNIVERSITEIT GENT, 2006, pages 52 - 75, XP055488406, Retrieved from the Internet [retrieved on 20170213]
SAULI F ET AL., ION FEEDBACK SUPPRESSION IN TIME PROJECTION CHAMBERS: NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS A, vol. 560, no. 2, 2006, pages 269 - 277
XIE WEN-QING ET AL., ELECTRON TRANSMISSION EFFICIENCY OF GATING-GEM FOIL FOR TPC: CHINESE PHYSICS C, vol. 36, no. 4, 2012, pages 339 - 343
P. GROS ET AL.: "Blocking positive ion backflow using a GEM GATE: experiment and simulations: 3rd INTERNATIONAL CONFERENCE ON MICRO PATTERN GASEOUS DETECTORS 1-6 JULY, 2013", JOURNAL OF INSTRUMENTATION, November 2013 (2013-11-01)
SAULI F ET AL., ION FEEDBACK SUPPRESSION IN TIME PROJECTION CHAMBERS: NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS A, vol. 560, no. 2, 2006, pages 269 - 277
XIE WEN-QING ET AL., ELECTRON TRANSMISSION EFFICIENCY OF GATING-GEM FOIL FOR TPC: CHINESE PHYSICS C, vol. 36, no. 4, 2012, pages 339 - 343
P. GROS ET AL.: "Blocking positive ion backflow using a GEM GATE: experiment and simulations: 3rd INTERNATIONAL CONFERENCE ON MICRO PATTERN GASEOUS DETECTORS 1-6 JULY, 2013", JOURNAL OF INSTRUMENTATION, November 2013 (2013-11-01)
Attorney, Agent or Firm:
TOKOSHIE PATENT FIRM (JP)
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