Title:
ION GUN
Document Type and Number:
WIPO Patent Application WO/2019/182111
Kind Code:
A1
Abstract:
The ion gun according to the present invention is provided with: an anode; a magnetic pole that has an interior surface facing the anode, an exterior surface disposed on the side opposite to the interior surface, a slit provided at a position corresponding to the anode, and an outer inclined surface which extends from one end of the exterior surface toward the center of the slit and which forms a part of the slit; and a cover which covers at least the exterior surface and the outer inclined surface, and which is composed of a non-magnetic material.
Inventors:
YUZE TAKUMI (JP)
TERASAWA TOSHIHIRO (JP)
TERASAWA TOSHIHIRO (JP)
Application Number:
PCT/JP2019/012082
Publication Date:
September 26, 2019
Filing Date:
March 22, 2019
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
H01J27/14; H01J37/08
Foreign References:
| JP2008127611A | 2008-06-05 | |||
| KR20160094918A | 2016-08-10 | |||
| JP2009048877A | 2009-03-05 | |||
| JP2008053116A | 2008-03-06 | |||
| US20120187843A1 | 2012-07-26 |
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
Download PDF:
Previous Patent: NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY
Next Patent: DEGRADATION DIAGNOSIS DEVICE FOR EXHAUST PURIFICATION SYSTEM
Next Patent: DEGRADATION DIAGNOSIS DEVICE FOR EXHAUST PURIFICATION SYSTEM