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Title:
ION SOURCE AND ION BEAM DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/054799
Kind Code:
A1
Abstract:
Provided is a charged particle beam microscope which has an emitter tip exhibiting a small mechanical oscillation amplitude, is capable of producing ultra-high resolution sample observation images, and eliminates blurring in the sample observation images. More specifically, provided is a charged particle beam microscope which is equipped with a gas field ionization source having an emitter tip for generating ions, an emitter base mount for supporting the emitter tip, a mechanism for heating the emitter tip, an extraction electrode provided facing the emitter tip, and a mechanism for supplying gas to the vicinity of the emitter tip. The gas field ionization source is characterized in that: the emitter tip heating mechanism heats the emitter tip by electrifying a filament connecting at least two terminals; the terminals are connected by a V-shaped filament; the angle of the V-shape is obtuse; and the emitter tip is connected approximately to the centre of the filament.

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Inventors:
SHICHI HIROYASU (JP)
MATSUBARA SHINICHI (JP)
OSE YOICHI (JP)
KAWANAMI YOSHIMI (JP)
ARAI NORIAKI (JP)
Application Number:
PCT/JP2012/076161
Publication Date:
April 18, 2013
Filing Date:
October 10, 2012
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J27/26; H01J37/08; H01J37/28
Domestic Patent References:
WO2003031668A12003-04-17
WO2011096227A12011-08-11
WO2009044564A12009-04-09
Foreign References:
JP2009517846A2009-04-30
US20070215802A12007-09-20
JPS52120673A1977-10-11
JP2006269431A2006-10-05
JPS63158730A1988-07-01
JPH05205680A1993-08-13
JPH05198224A1993-08-06
JP2008175640A2008-07-31
JPH04215231A1992-08-06
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Download PDF:
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Claims:



 
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