Title:
ION SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/058511
Kind Code:
A1
Abstract:
An ion source device 10A is provided with: cathode electrodes 13b, 13b that emit electrons; an anode electrode 13a having a slit 13aa through which ions are extracted; an extraction electrode 15, which is disposed by being separated from the anode electrode 13a in the extraction direction of the ions extracted from the anode electrode 13a, so that a potential difference is formed between the anode electrode 13a and the extraction electrode; and an intermediate electrode 16 that is provided between the anode electrode 13a and the extraction electrode 15. A first potential difference (∆V1) between the anode electrode 13a and the intermediate electrode 16 is larger than a second potential difference (∆V2) between the anode electrode 13a and the extraction electrode 15.
Inventors:
HIASA TOSHIKAZU (JP)
TANIGUCHI MANAMI (JP)
TANIGUCHI MANAMI (JP)
Application Number:
PCT/JP2017/034323
Publication Date:
March 28, 2019
Filing Date:
September 22, 2017
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
H01J27/20; H01J37/08
Foreign References:
| JP2001126630A | 2001-05-11 | |||
| JP2014183041A | 2014-09-29 | |||
| JPH087822A | 1996-01-12 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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